Investigation of superlattice structure parameters using quasi-forbidden reflections

Abstract

We studied possibilities of a nondestructive X-ray technique for testing short-period strained GaAs-AlAs superlattices. An analysis of the quasi-forbidden 200 reflections may be used for determination of superlattice layer structure parameters and sublayer thickness. The effect of irregularity of superlattice transition region on X-ray diffraction reflection curves and elastic strains in layers was studied.