Влияние добавок TiN, Mo, Ni на электросопротивление и прочность горячепрессованного нитрида кремния

Abstract

The influence of TiN, Mo, Ni additions on resistivity and strength of hot pressed silicon nitride has been investigated. Dense material based on silicon nitride with additives up to 30 % TiN and 1,7 % Mo (volume percents) was prepared. It has bending strength 450–500 MPa and specific resistivity~ 10-2 Ω·m. The behavior of material permits to manufacture of complex shape parts by spark cutting. The nickel addition has negative affect on strength of hot pressed silicon nitride.