Моделювання радiацiйних та релаксацiйних процесiв в iмплантованих iонами кисню плiвках залiзоiтрiєвого гранату

Abstract

The mechanisms of the formation of defects in superficial layers of epitaxial yttrium iron garnet films during the implantation by oxygen ions (E = 90 keV) are investigated by mathematical modeling methods. Secondary implantation processes and the evolution of the cascade collisions of target atoms up to a thermodynamical equilibrium state are studied.