Элементный анализ аморфных углеродных пленок

Abstract

The elemental analysis of amorphous carbon film produce in focus on the diamond-like type by the low temperature chemical vapour deposition and physical vapour deposition have been presented. The amorphous carbon films proposed as protective, wear-resistive, anti-reflective, chemical inert and biocompatible coatings for the application in optics, electronics, machine-building and medicine by the complex investigation of the film structural and physical properties.