Structure of Fe-Cu coatings prepared by the magnetron sputtering method

Abstract

This work presents the results of our research concerning the synthesis of metallic Fe-Cu coatings by use of the magnetron sputtering method. The structure of the coatings synthesized during two modes of pulsed magnetron sputtering was compared . In our experiment the pulsed magnetron power supply generated a series of pulses gated at 1kHz - standard pulsed mode (SPM) and 2 Hz - low frequency pulsed mode (LFPM). The analysis of the microstructure by means of SEM and TEM show that obtained coatings are characterized by nanocrystalline structure. Additionally the optical emission spectra (OES) during the copper and iron sputtering were measured.