Ion kinetics in an ECR plasma source

dc.contributor.authorGutiérrez-Tapia, C.
dc.date.accessioned2015-04-14T18:31:52Z
dc.date.available2015-04-14T18:31:52Z
dc.date.issued2002
dc.description.abstractIn plasma reactors it is extremely important the study for achieving greater control of critical parameters such as the flux velocities and the energy distribution of ions. These quantities are functions of the reactor physical dimensions, magnetic field profile as well as the kinetic chemical reactions occurring in the discharge. In this work, a model previously reported in [1] is improved. In that model using the drift kinetic equation approach the axial and radial ion fluxes at processing zone of an ECR plasma source are calculated. Now, the ionization rates are calculated from the energy distribution function obtained by a regularization method and using the experimental data of the electric probe measurements. Also, a more exact calculation of the external magnetic field is included.uk_UA
dc.description.sponsorshipThis work was patially supported by project CONACyT 33873-Euk_UA
dc.identifier.citationIon kinetics in an ECR plasma source / C. Gutiérrez-Tapia // Вопросы атомной науки и техники. — 2002. — № 4. — С. 170-172. — Бібліогр.: 5 назв. — англ.uk_UA
dc.identifier.issn1562-6016
dc.identifier.otherPACS: 52.50.-b
dc.identifier.urihttps://nasplib.isofts.kiev.ua/handle/123456789/80327
dc.language.isoenuk_UA
dc.publisherНаціональний науковий центр «Харківський фізико-технічний інститут» НАН Україниuk_UA
dc.relation.ispartofВопросы атомной науки и техники
dc.statuspublished earlieruk_UA
dc.subjectLow temperature plasma and plasma technologiesuk_UA
dc.titleIon kinetics in an ECR plasma sourceuk_UA
dc.typeArticleuk_UA

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