Ion kinetics in an ECR plasma source
dc.contributor.author | Gutiérrez-Tapia, C. | |
dc.date.accessioned | 2015-04-14T18:31:52Z | |
dc.date.available | 2015-04-14T18:31:52Z | |
dc.date.issued | 2002 | |
dc.description.abstract | In plasma reactors it is extremely important the study for achieving greater control of critical parameters such as the flux velocities and the energy distribution of ions. These quantities are functions of the reactor physical dimensions, magnetic field profile as well as the kinetic chemical reactions occurring in the discharge. In this work, a model previously reported in [1] is improved. In that model using the drift kinetic equation approach the axial and radial ion fluxes at processing zone of an ECR plasma source are calculated. Now, the ionization rates are calculated from the energy distribution function obtained by a regularization method and using the experimental data of the electric probe measurements. Also, a more exact calculation of the external magnetic field is included. | uk_UA |
dc.description.sponsorship | This work was patially supported by project CONACyT 33873-E | uk_UA |
dc.identifier.citation | Ion kinetics in an ECR plasma source / C. Gutiérrez-Tapia // Вопросы атомной науки и техники. — 2002. — № 4. — С. 170-172. — Бібліогр.: 5 назв. — англ. | uk_UA |
dc.identifier.issn | 1562-6016 | |
dc.identifier.other | PACS: 52.50.-b | |
dc.identifier.uri | https://nasplib.isofts.kiev.ua/handle/123456789/80327 | |
dc.language.iso | en | uk_UA |
dc.publisher | Національний науковий центр «Харківський фізико-технічний інститут» НАН України | uk_UA |
dc.relation.ispartof | Вопросы атомной науки и техники | |
dc.status | published earlier | uk_UA |
dc.subject | Low temperature plasma and plasma technologies | uk_UA |
dc.title | Ion kinetics in an ECR plasma source | uk_UA |
dc.type | Article | uk_UA |
Файли
Оригінальний контейнер
1 - 1 з 1
Завантаження...
- Назва:
- 50-Gutierrez-Tapia.pdf
- Розмір:
- 201.18 KB
- Формат:
- Adobe Portable Document Format
Контейнер ліцензії
1 - 1 з 1
Завантаження...
- Назва:
- license.txt
- Розмір:
- 817 B
- Формат:
- Item-specific license agreed upon to submission
- Опис: