Generating of low energy intensive ion streams in conditions of low pressure

Abstract

In the work the method of forming of low energy ion streams near the sample surface with separating the generation area of plasma and the acceleration area of ion is offered. It allows to lower pressure in acceleration area essentially (0.01 Pa and below). The separating of the areas takes place at the expense of vacuum resistance in a plasma generating device. The dependence of plasma parameters on exterior parameters of the device is determined and the way of the further decreasing of working pressure in the modification area up to 10⁻³ – 10⁻⁴ Pa are shown.