High-stable standard samples of mass in the nano-gram range

Abstract

High-stable mass standards prepared as magnetron sputtered super-smooth metal layers deposited on single crystal substrates were attested. The thin film standards were found to meet the requirements to government standards: they are homogeneous, long-lived, and can be attested by several independent methods. Using the standards, the measurement accuracy is provided not worse than 1 ng in the range from 1 to 17 ng, and not worse than 8 ng in the range from 17 to 3800 ng.