Investigation of Al-ZERODUR interface by Raman and secondary ion mass spectroscopy
dc.contributor.author | Berezhinsky, L.I. | |
dc.contributor.author | Yukhymchuk, V.A. | |
dc.contributor.author | Maslov, V.P. | |
dc.contributor.author | Tetyorkin, V.V. | |
dc.date.accessioned | 2017-06-15T03:49:52Z | |
dc.date.available | 2017-06-15T03:49:52Z | |
dc.date.issued | 2005 | |
dc.description.abstract | The interface of ZERODUR ceramics and thin aluminium film was investigated by Raman and secondary ion mass-spectroscopy techniques. Possible chemical reactions at the interface is briefly analyzed and compared with experimental data. Contributions of amorphous and crystalline phases of ZERODUR to Raman spectra are discussed. Keywords: ZERODUR ceramics, Raman spectra, secondary ion mass-spectroscopy. Manuscript received 19.04.05; accepted for publication 18.05.05. | uk_UA |
dc.identifier.citation | Investigation of Al-ZERODUR interface by Raman and secondary ion mass spectroscopy / L.I. Berezhinsky, V.P. Maslov V.V. Tetyorkin and V.A.Yukhymchuk // Semiconductor Physics Quantum Electronics & Optoelectronics. — 2005. — Т. 8, № 2. — С. 37-40. — Бібліогр.: 5 назв. — англ. | uk_UA |
dc.identifier.issn | 1560-8034 | |
dc.identifier.other | PACS: 78.30.L | |
dc.identifier.uri | https://nasplib.isofts.kiev.ua/handle/123456789/121644 | |
dc.language.iso | en | uk_UA |
dc.publisher | Інститут фізики напівпровідників імені В.Є. Лашкарьова НАН України | uk_UA |
dc.relation.ispartof | Semiconductor Physics Quantum Electronics & Optoelectronics | |
dc.status | published earlier | uk_UA |
dc.title | Investigation of Al-ZERODUR interface by Raman and secondary ion mass spectroscopy | uk_UA |
dc.type | Article | uk_UA |
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